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    • Poly Silicon Outer UE

      Poly Silicon Outer UE

      Material: single-crystal silicon

      Usage process: Dry Etch

    • C Shield Ring

      C Shield Ring

      Material: single-crystal silicon

      Usage process: Dry Etch

    • Si Upper Electrode

      Si Upper Electrode

      Material: single-crystal silicon

      Usage process: Dry Etch

    • Si Upper Electrode

      Si Upper Electrode

      Material: single-crystal silicon

      Usage process: Dry Etch

    • Si Ring

      Si Ring

      Material: single-crystal silicon

      Usage process: Dry Etch

    • Si Ring

      Si Ring

      Material: single-crystal silicon

      Usage process: Dry Etch